Dramatic size reduction of waveguide bends on a micron-scale silicon photonic platform

被引:178
作者
Cherchi, Matteo [1 ]
Ylinen, Sami [1 ]
Harjanne, Mikko [1 ]
Kapulainen, Markku [1 ]
Aalto, Timo [1 ]
机构
[1] VTT Tech Res Ctr Finland, Espoo 02040, Finland
关键词
ON-INSULATOR; MODE CHARACTERISTICS; DESIGN; DEVICES;
D O I
10.1364/OE.21.017814
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We demonstrate theoretically and experimentally how highly multimodal high index contrast waveguides with micron-scale cores can be bent, on an ultra-broad band of operation, with bending radii below 10 mu m and losses for the fundamental mode below 0.02 dB/90. The bends have been designed based on the Euler spiral and fabricated on 4 mu m thick SOI. The proposed approach enabled also the realization of 180 bends with 1.27 mu m effective radii and 0.09 dB loss, which are the smallest low-loss bends ever reported for an optical waveguide. These results pave the way for unprecedented integration density in most semiconductor platforms. (C) 2013 Optical Society of America
引用
收藏
页码:17814 / 17823
页数:10
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