Self-sensing micro- and nanocantilevers with attonewton-scale force resolution

被引：95
作者：
Arlett, J. L.
Maloney, J. R.
Gudlewski, B.
Muluneh, M.
Roukes, M. L. [1 ]
机构：
[1] CALTECH, Kavli Nanosci Inst, Pasadena, CA 91125 USA
[2] CALTECH, Dept Phys Appl Phys & Bioengn, Pasadena, CA 91125 USA
来源：
NANO LETTERS | 2006年 / 6卷 / 05期
关键词：
D O I：
10.1021/nl060275y
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Thin, piezoresistive silicon cantilevers are shown to provide unprecedented sensitivity for force detection in an integrated, self-sensing, readily scalable configuration. The devices realized herein are patterned from single- crystal Si epilayer membranes utilizing bulk micro- and nanomachining processes. We demonstrate an electrically transduced force sensitivity of 235 aN/Hz(1/2) at room temperature and 17 aN/Hz(1/2) at 10 K. Enhancement of the p+ piezoresistive gauge factor is observed at cryogenic temperatures. The results are employed to elucidate the ultimate, low-temperature sensitivity attainable from self-sensing nanoelectromechanical systems utilizing displacement transduction based upon semiconducting piezoresistors.
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页码：1000 / 1006
页数：7
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