Ultra-thin nanocrystalline diamond membranes as pressure sensors for harsh environments

被引：28

作者：

Janssens, S. D. ^{[1
,2
]}

Drijkoningen, S. ^{[1
]}

Haenen, K. ^{[1
,2
]}

机构：

[1] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium

[2] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium

来源：

APPLIED PHYSICS LETTERS | 2014年 / 104卷 / 07期

关键词：

BULGE TEST; FILMS;

D O I：

10.1063/1.4866028

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Glass and diamond are suitable materials for harsh environments. Here, a procedure for fabricating ultra-thin nanocrystalline diamond membranes on glass, acting as an electrically insulating substrate, is presented. In order to investigate the pressure sensing properties of such membranes, a circular, highly conductive boron-doped nanocrystalline diamond membrane with a resistivity of 38 m Omega cm, a thickness of 150 nm, and a diameter of 555 mu m is fabricated in the middle of a Hall bar structure. During the application of a positive differential pressure under the membrane (0-0.7 bar), four point piezoresistive effect measurements are performed. From these measurements, it can be concluded that the resistance response of the membrane, as a function of differential pressure, is highly linear and sensitive. (C) 2014 AIP Publishing LLC.

引用

页数：4

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