Spatial measurements of electron energy distribution and plasma parameters in a weakly magnetized inductive discharge

被引：8

作者：

Kim, Young-Do ^{[1
]}

Lee, Young-Kwang ^{[1
]}

Lee, Hyo-Chang ^{[1
]}

Chung, Chin-Wook ^{[1
]}

机构：

[1] Hanyang Univ, Dept Elect Engn, Seoul 133791, South Korea

来源：

PHYSICS OF PLASMAS | 2013年 / 20卷 / 02期

基金：

新加坡国家研究基金会;

关键词：

This work was partially supported by the Industrial Strategic Technology Development Program (10041681; Development of fundamental technology for 10 nm process semiconductor and 10 G size large area process with high plasma density and VHF condition) funded by the Ministry of Knowledge Economy (MKE; Korea).This research was partially supported by the Converging Research Center Program through the Ministry of Education; Science and Technology(2012K001238).This work was partially supported by the National R&D Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education; Science; and Technology (Grant No. 2010-0020061).This work was partially supported by the SRC (2010-0029413);

D O I：

10.1063/1.4790664

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Spatial characteristics of plasma parameters such as electron temperature, plasma density, plasma potential, and electron energy distribution (EED) were studied in inductively coupled plasma with an axial dc magnetic field. With dc magnetic field, the measured EEDs in the total electron energy scale are spatially coincided except cutting of the low electron energy part indicating the conserved non-local electron kinetics in an axial direction, even though the dc magnetic field is applied. Spatial distributions of the plasma densities at axial positions have almost same trends with various magnetic field strengths. We also discuss the reduction of the ambipolar potential along the axial direction as the applied magnetic field increased. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4790664]

引用

页数：5

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