Synthesis of freestanding single-crystal perovskite films and heterostructures by etching of sacrificial water-soluble layers

被引:516
作者
Lu, Di [1 ,2 ]
Baek, David J. [3 ]
Hong, Seung Sae [2 ,4 ]
Kourkoutis, Lena F. [5 ,6 ]
Hikita, Yasuyuki [2 ]
Hwang, Harold Y. [2 ,4 ]
机构
[1] Stanford Univ, Dept Phys, Stanford, CA 94305 USA
[2] SLAC Natl Accelerator Lab, Stanford Inst Mat & Energy Sci, Menlo Pk, CA 94025 USA
[3] Cornell Univ, Sch Elect & Comp Engn, Ithaca, NY 14853 USA
[4] Stanford Univ, Dept Appl Phys, Stanford, CA 94305 USA
[5] Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USA
[6] Cornell Univ, Kavli Inst Cornell Nanoscale Sci, Ithaca, NY 14853 USA
关键词
OXIDE INTERFACES; THIN-FILMS; INSULATOR; SEMICONDUCTOR; NANOMEMBRANES; ELECTRONICS; TRANSISTORS; GRAPHENE;
D O I
10.1038/nmat4749
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The ability to create and manipulate materials in two-dimensional (2D) form has repeatedly had transformative impact on science and technology. In parallel with the exfoliation and stacking of intrinsically layered crystals(1-5), atomic-scale thin film growth of complex materials has enabled the creation of artificial 2D heterostructures with novel functionality(6-9) and emergent phenomena, as seen in perovskite heterostructures(10-12). However, separation of these layers from the growth substrate has proved challenging, limiting the manipulation capabilities of these heterostructures with respect to exfoliated materials. Here we present a general method to create freestanding perovskite membranes. The key is the epitaxial growth of water-soluble Sr3Al2O6 on perovskite substrates, followed by in situ growth of films and heterostructures. Millimetre-size single-crystalline membranes are produced by etching the Sr3Al2O6 layer in water, providing the opportunity to transfer them to arbitrary substrates and integrate them with heterostructures of semiconductors and layered compounds's(13,14).
引用
收藏
页码:1255 / 1260
页数:6
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