Si nanophotonics based cantilever sensor

被引：39

作者：

Lee, Chengkuo ^{[1
,2
]}

Thillaigovindan, Jayaraj ^{[1
]}

Chen, Chii-Chang ^{[3
]}

Chen, Xian Tong ^{[2
]}

Chao, Ya-Ting ^{[4
]}

Tao, Shaohua ^{[2
]}

Xiang, Wenfeng ^{[1
]}

Yu, Aibin ^{[2
]}

Feng, Hanhua ^{[2
]}

Lo, G. Q. ^{[2
]}

机构：

[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore

[2] ASTAR, Agcy Sci Technol & Res, Inst Microelect, Singapore 117685, Singapore

[3] Natl Cent Univ, Dept Opt & Photon, Jhongli 32001, Taiwan

[4] Yuan Univ, Dept Comp Sci & Engn, Chungli 32003, Taiwan

来源：

APPLIED PHYSICS LETTERS | 2008年 / 93卷 / 11期

关键词：

D O I：

10.1063/1.2987515

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present design and simulation results of a novel nanomechanical sensor using silicon cantilever embedded with a two-dimensional photonic crystal microcavity resonator. Both of resonant wavelength and resonant wavelength shift could be measured as a function of various physical parameters such as applied force, strain, and displacement. Rather linear relationship is derived for strain and resonant wavelength shift. This new nanomechanical sensor shows promising features for biomolecules detection. (C) 2008 American Institute of Physics.

引用

页数：3

共 11 条

[1]

Brugger J., 1992, Journal of Micromechanics and Microengineering, V2, P218, DOI 10.1088/0960-1317/2/3/026

[2] Photonic-bandgap microcavities in optical waveguides [J].

Foresi, JS ;

Villeneuve, PR ;

Ferrera, J ;

Thoen, ER ;

Steinmeyer, G ;

Fan, S ;

Joannopoulos, JD ;

Kimerling, LC ;

Smith, HI ;

Ippen, EP .

NATURE, 1997, 390 (6656) :143-145

[3] Deflection detection and feedback actuation using a self-excited piezoelectric Pb(Zr,Ti)O-3 microcantilever for dynamic scanning force microscopy [J].

Itoh, T ;

Lee, C ;

Suga, T .

APPLIED PHYSICS LETTERS, 1996, 69 (14) :2036-2038

[4]

KAWANO K, 2001, INTRO OPTICAL WAVEGU, pCH2

[5] Cantilever transducers as a platform for chemical and biological sensors [J].

Lavrik, NV ;

Sepaniak, MJ ;

Datskos, PG .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2004, 75 (07) :2229-2253

[6] Design and modeling of a nanomechanical sensor using silicon photonic crystals [J].

Lee, Chengkuo ;

Radhakrishnan, Rohit ;

Chen, Chii-Chang ;

Li, Jing ;

Thillaigovindan, Jayaraj ;

Balasubramanian, N. .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2008, 26 (5-8) :839-846

[7] Characterization of micromachined piezoelectric PZT force sensors for dynamic scanning force microscopy [J].

Lee, CK ;

Itoh, T ;

Maeda, R ;

Suga, T .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1997, 68 (05) :2091-2100

[8] Ultrasensitive displacement sensing using photonic crystal waveguides [J].

Levy, O ;

Steinberg, BZ ;

Nathan, M ;

Boag, A .

APPLIED PHYSICS LETTERS, 2005, 86 (10) :1-3

[9]

SVELTO O, 1989, PRINCIPLES LASERS, P153

[10] ATOMIC RESOLUTION WITH AN ATOMIC FORCE MICROSCOPE USING PIEZORESISTIVE DETECTION [J].

TORTONESE, M ;

BARRETT, RC ;

QUATE, CF .

APPLIED PHYSICS LETTERS, 1993, 62 (08) :834-836

← 1 2 →