Reflective optical sensor for long-range and high-resolution displacements

被引：63
|
作者：
Prelle, C [1 ]
Lamarque, F [1 ]
Revel, P [1 ]
机构：
[1] Univ Technol Compiegne, Lab Roberval, FRE, UTC,CNRS 2833, Compiegne, France
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2006年 / 127卷 / 01期
关键词：
fiber optic; grating; miniature displacement sensor; diamond machining;
D O I：
10.1016/j.sna.2005.11.005
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper describes a miniature optical displacement sensor with millimetric range and nanometric resolution. This kind of sensor should be integrated in a mesomachine able to make accurate micro/nano-manipulation tasks on wide strokes. This sensor consists of a triangular grating and two fiber optic probes. We introduce the sensor principle and the modeling. The grating is obtained by diamond turning on aluminum alloy. The agreement between simulation and experimental results is very good and the mini-sensor is able to measure a displacement with a 14.9 nm resolution over a 11.8 mm range. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：139 / 146
页数：8
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