The effect of a cap layer on the diffusion of zinc from doped silica films in gallium arsenide

被引:0
作者
Chatterjee, S
Bhat, KN
Rao, PRS
机构
[1] Department of Electrical Engineering, Indian Institute of Technology
关键词
ZN DIFFUSION; GAAS; MODEL; MECHANISM;
D O I
10.1016/S0038-1101(96)00193-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
[No abstract available]
引用
收藏
页码:496 / 500
页数:5
相关论文
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