Bilayer Al wire-grids as broadband and high-performance polarizers

被引:159
作者
Ekinci, Y [1 ]
Solak, HH [1 ]
David, C [1 ]
Sigg, H [1 ]
机构
[1] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland
关键词
D O I
10.1364/OE.14.002323
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We have fabricated, characterized and theoretically analyzed the performance of bilayer (or stacked) metallic wire-grids. The samples with 100 nm period were fabricated with extreme-ultraviolet interference lithography. Transmission efficiency over 50% and extinction ratios higher than 40 dB were measured in the visible range with these devices. Simulations using a finite-difference time-domain algorithm are in agreement with the experimental results and show that the transmission spectra are governed by Fabry-Perot interference and near-field coupling between the two layers of the structure. The simple fabrication method involves only a single lithographic step without any etching and guarantees precise alignment and separation of the two wire-grids with respect to each other. (c) 2006 Optical Society of America.
引用
收藏
页码:2323 / 2334
页数:12
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