Review of Silicon Photonics Foundry Efforts

被引：333

作者：

Lim, Andy Eu-Jin ^{[1
]}

Song, Junfeng ^{[1
,2
]}

Fang, Qing ^{[1
]}

Li, Chao ^{[1
]}

Tu, Xiaoguang ^{[1
]}

Duan, Ning ^{[1
]}

Chen, Kok Kiong ^{[1
]}

Tern, Roger Poh-Cher ^{[1
]}

Liow, Tsung-Yang ^{[1
]}

机构：

[1] ASTAR, Inst Microelect, Singapore 117685, Singapore

[2] Jilin Univ, StateKey Lab Integrated Optoelect, Coll Elect Sci & Engn, Changchun 130023, Peoples R China

来源：

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 2014年 / 20卷 / 04期

关键词：

Foundry; manufacturing; multi-project wafer (MPW); photonic integration; silicon photonics; PHOTODETECTOR; INTEGRATION; COMPACT;

D O I：

10.1109/JSTQE.2013.2293274

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Silicon photonics have progressed to a point where the next step for commercialization depends on the accessibility of manufacturing foundries. The implementation of a fabless foundry model using standardized process technology platforms is crucial for that to occur. Research and development (R&D) foundries are beginning to play bigger roles in transforming silicon photonics into a mature technology for mass production. R&D foundry services such as multi-project wafer (MPW) shuttles, customized process developmental runs and small volume manufacturing are discussed. The development of commercial foundries for low cost, high volume production is also shown to be underway, and key results from an on-going effort to set-up a manufacturing silicon photonics foundry line are presented.

引用

页数：12

共 33 条

[31]

Yang X., 2013, P OPT FIB COMM C

[32] A CMOS-Compatible, Low-Loss, and Low-Crosstalk Silicon Waveguide Crossing [J].

Zhang, Yi ;

Yang, Shuyu ;

Lim, Andy Eu-Jin ;

Lo, Guo-Qiang ;

Galland, Christophe ;

Baehr-Jones, Tom ;

Hochberg, Michael .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2013, 25 (05) :422-425

[33] A compact and low loss Y-junction for submicron silicon waveguide [J].