Effect of carbon content on the microstructure and properties of W-Si-C-N coatings fabricated by magnetron sputtering

被引：17

作者：

Yang, Junfeng ^{[1
]}

Jiang, Yan ^{[1
]}

Yuan, Zhigang ^{[1
]}

Wang, Xianping ^{[1
]}

Fang, Qianfeng ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Hefei 230031, Peoples R China

来源：

MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS | 2012年 / 177卷 / 13期

基金：

中国国家自然科学基金;

关键词：

Hardness measurements; W-Si-C-N; Residual stresses; Wear; CHEMICAL-VAPOR-DEPOSITION; NANOCOMPOSITE COATINGS; TRIBOLOGICAL BEHAVIOR; STRUCTURAL-PROPERTIES; NITRIDE FILMS; SUPER-HARD; MECHANICAL-PROPERTIES; RAMAN-SPECTROSCOPY; SYSTEM; STRESS;

D O I：

10.1016/j.mseb.2012.05.021

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A series of W-Si-C (4-5 at.%)-N nanocomposite coatings with different C contents have been deposited on Si wafer substrates by reactive magnetron sputtering of W-Si-C composite target in Ar + N-2 mixed atmosphere. Microstructure characteristics and mechanical properties of W-Si-C-N coatings were investigated in this paper. Results exhibited that W-Si-C-N coatings possess nanocomposite microstructure where nano-crystallites W-2(C, N) embedded in amorphous matrix of Si3N4/CNx/C. As the C content increased, the hardness and Youngs' modulus of the W-Si-C-N coatings first increased and then decreased, reaching the maximum value of approximate 36 GPa and 382 GPa, respectively, for coatings containing 11.1 at.% C. All the coatings are in compressive stress state, ranging from 0.8 to 2.0 GPa. In addition, friction coefficient of the W-Si-C-N coatings considerably decreased with the increase of C content. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：1120 / 1125

页数：6

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