共 12 条
[4]
IMPRINT OF SUB-25 NM VIAS AND TRENCHES IN POLYMERS
[J].
APPLIED PHYSICS LETTERS,
1995, 67 (21)
:3114-3116
[9]
ORAEVSKY AA, 1993, P SOC PHOTO-OPT INS, V1882, P86, DOI 10.1117/12.147694