Energy-filtered image of surface blisters by grazing incidence electron microscopy

被引：8

作者：

Igarashi, S ^{[1
]}

Muto, S

Tanabe, T

Maruyama, T

机构：

[1] Nagoya Univ, Ctr Integrated Res Sci & Engn, Nagoya, Aichi 4648603, Japan

[2] Wakasa Wan Energy Res Ctr, Tsuruga 9140192, Japan

来源：

MATERIALS TRANSACTIONS | 2001年 / 42卷 / 10期

关键词：

silicon; ion irradiation; energy filtering transmission electron microscopy; elemental distribution image;

D O I：

10.2320/matertrans.42.2131

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have examined fine structure of surface blisters formed by D+ or He+ irradiation onto mono-crystalline silicon by grazing incidence electron microscopy (GIEM), using an energy-filtering transmission electron microscope (EFTEM). Mapping of the projected thickness clearly visualized the structural difference of the blister skins formed by D+ and He+ irradiation respectively. A He distribution image of the He-blister was also successfully obtained.

引用

页码：2131 / 2132

页数：2

共 4 条

[1] EGERTON RF, 1986, ELECT ENERGY LOSS SP, P163
[2] Nondestructive observation of mesoscopical surface protrusions by grazing incidence electron microscopy
Igarashi, S
Muto, S
Tanabe, T
[J]. JOURNAL OF THE JAPAN INSTITUTE OF METALS, 2001, 65 (05) : 423 - 426
[3] Observation of surface blistering by grazing incidence electron microscopy
Muto, S
Matsui, T
Tanabe, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2000, 39 (6A): : 3555 - 3556
[4] Non-destructive structural analysis of surface blistering by TEM and EELS in a reflection configuration
Muto, S
Matsui, T
Tanabe, T
[J]. JOURNAL OF NUCLEAR MATERIALS, 2001, 290 : 131 - 134

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