A finite-element analysis of surface wave plasmas

被引：1

作者：

Igarashi, H ^{[1
]}

Watanabe, K ^{[1
]}

Ito, T ^{[1
]}

Fukuda, T ^{[1
]}

Honma, T ^{[1
]}

机构：

[1] Hokkaido Univ, Grad Sch Engn, Sapporo, Hokkaido 0608628, Japan

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2004年 / 40卷 / 02期

关键词：

chemical vapor deposition (CVD); finite-difference time-domain (FDTD); finite-element method (FEM); plasma; surface wave;

D O I：

10.1109/TMAG.2004.825450

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a finite-element analysis of surface microwaves coupled to a cold nonmagnetized plasma for chemical vapor deposition (CVD). The microwave-plasma coupling is taken into account by introducing the frequency-dependent permittivity. The computed resonant modes of the surface wave on the interface between the dielectric and plasma in a cylindrical vessel are shown to be in good agreement with the theoretical ones. Moreover, the computed field distribution for a waveguide loaded cylindrical vessel agrees well with that computed by the finite-difference time-domain (FDTD) method.

引用

页码：605 / 608

页数：4

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