A novel method for preparing α-In2Te3 polycrystalline thin films

被引:38
作者
Emziane, M
Bernède, JC
Ouerfelli, J
Essaidi, H
Barreau, A
机构
[1] GPSE FSTN, Equipe Couches Minces & Mat Nouveaux, F-44322 Nantes 3, France
[2] Fac Sci Tunis, LPMC, Tunis, Tunisia
[3] Fac Sci, Ctr Commun Microscopie Elect, F-44322 Nantes, France
关键词
X-ray diffraction; electron microprobe analysis; X-ray photoelectron spectroscopy;
D O I
10.1016/S0254-0584(99)00143-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Indium telluride In2Te3 polycrystalline thin films of different thicknesses were prepared using sequential thermal evaporation of In and Te layers on glass and SnO2 coated glass substrates held at room temperature. The post-deposition annealing was performed in an argon or a nitrogen atmosphere at different temperatures and for several durations. The influence of the annealing conditions on the film structure was investigated The characterization of the films was made by X-ray diffraction, electron microprobe analysis, X-ray photoelectron spectroscopy, scanning electron microscopy, Raman scattering and optical transmission. We show that annealing at a temperature of 663 for 30 min leads to monophased and homogeneous alpha-In2Te3 thin films. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:229 / 236
页数:8
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