Micro/nanomechanical resonators for distributed mass sensing with capacitive detection

被引：27
作者：
Arcamone, J
Rius, G
Abadal, G
Teva, J
Barniol, N
Perez-Murano, F
机构：
[1] CSIC, Ctr Nacl Microelect, IMB, Bellaterra 08193, Spain
[2] Dept Elect Engn, Bellaterra 08193, Spain
来源：
MICROELECTRONIC ENGINEERING | 2006年 / 83卷 / 4-9期
关键词：
nano-micromechanical resonators; distributed mass sensing; capacitive detection; monolithic integration;
D O I：
10.1016/j.mee.2006.01.177
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Micro/nanomechanical resonators have been designed and fabricated with the aim to be used as distributed mass sensors for in situ measurement of the thickness of ultra-thin layers. First, we present a comparative study of three kinds of oscillating devices (cantilever, bridge and quad beam). The quad beam design has been selected for fabrication because it combines high sensitivity and good electrical response. The complete fabrication process of the device is based on electron beam lithography, lift-off and reactive ion etching. The frequency response has been characterized by means of electrical excitation and capacitive read-out. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码：1216 / 1220
页数：5
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