Dynamics of gold cluster systems

被引:4
作者
Berlinger, A [1 ]
机构
[1] Forschungszentrum Karlsruhe, Inst Mat Forsch 1, D-76021 Karlsruhe, Germany
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1999年 / 68卷 / 04期
关键词
PACS: 36.40.Sx; 61.16.Ch; 61.46.+w;
D O I
10.1007/s003390050913
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The growth of gold clusters on the surface of 10-nm-thick gold films deposited on the isotropic native SiOx surface of Si(lll) wafers was studied as a function of annealing time at relatively low annealing temperatures (50 and 100 degrees C) by application of scanning force microscopy. A fast increase in cluster diameter and height as a function of annealing time was detected. After more than 3 h of annealing depletion zones and nucleation exclusion zones were observed.
引用
收藏
页码:403 / 405
页数:3
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