On negative ions Langmuir probe measurements in an Ar+4%CF4 currentless plasma

被引：0
|
作者：
Popov, T [1 ]
Ivanova, D [1 ]
Tchernookov, M [1 ]
机构：
[1] Univ Sofia, Fac Phys, Sofia 1164, Bulgaria
来源：
ADVANCED TECHNOLOGIES BASED ON WAVE AND BEAM GENERATED PLASMAS | 1999年 / 67卷
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D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：473 / 474
页数：2
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