Optical investigations of Cr and CrN layers obtained by magnetron sputtering in Ion Beam Assisted Deposition process (IBAD)

被引：4

作者：

Oleszkiewicz, W ^{[1
]}

Oleszkiewicz, E ^{[1
]}

Zukowska, K ^{[1
]}

机构：

[1] Wroclaw Univ Technol, Inst Microsyst Technol, Wroclaw, Poland

来源：

11TH SLOVAK-CZECH-POLISH OPTICAL CONFERENCE ON WAVE AND QUANTUM ASPECTS OF CONTEMPORARY OPTICS | 1999年 / 3820卷

关键词：

Cr; CrN; ion beam assisted deposition (IBAD); magnetron sputtering; ellipsometry; optical constants;

D O I：

10.1117/12.353095

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

In the ion beam deposition process the source of material was Cr target subjected to magnetron sputtering. Cr and CrN layers deposition processes were caried out in the presence of Ar and Ar+N-2 ions atmosphere. The optical investigations of Cr and CrN layers obtained by IBAD processes were made to estimate the efficiency of such modyfying factor as ion beam bombardment. The optical constants n and k were determined by ellipsometry for Cr and CrN layers deposited onto grounded or negatively biased (bias voltages from 0 to 500V) BK7 glass substrates.

引用

页码：423 / 428

页数：6

共 11 条

[1]

Azzam R., 1977, ELLIPSOMETRY POLARIZ

[2] Development of chromium nitride coatings substituting titanium nitride [J].

Berg, G ;

Friedrich, C ;

Broszeit, E ;

Berger, C .

SURFACE & COATINGS TECHNOLOGY, 1996, 86 (1-3) :184-191

[3] Low energy ion assist during deposition - An effective tool for controlling thin film microstructure [J].

Ensinger, W .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 127 :796-808

[4] Development of large area sputtered solar absorber coatings [J].

Graf, W ;

Brucker, F ;

Kohl, M ;

Troscher, T ;

Wittwer, V ;

Herlitze, L .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1997, 218 :380-387

[5] Examination of wear mechanisms of hard coatings [J].

Niebuhr, T ;

Bubert, H ;

Steffens, HD ;

Haumann, D ;

Kauder, K ;

Damgen, U .

FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY, 1997, 358 (1-2) :278-280

[6]

Oleszkiewicz W., 1997, OPTO-ELECTRON REV, V5, P133

[7]

OLESZKIEWICZ W, 1997, 6 K NAUK TECHN EL EL, V2, P413

[8]

Podob M, 1996, PLAT SURF FINISH, V83, P42

[9] A COMPARISON OF THE CORROSION BEHAVIOR AND HARDNESS OF STEEL SAMPLES (100CR6) COATED WITH TITANIUM NITRIDE AND CHROMIUM NITRIDE BY DIFFERENT INSTITUTIONS USING DIFFERENT DEPOSITION TECHNIQUES [J].

SCHROER, A ;

ENSINGER, W ;

WOLF, GK .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1991, 140 :625-630

[10] THE DEVELOPMENT OF HIGH-PERFORMANCE, LOW-COST SOLAR-SELECTIVE ABSORBERS [J].

SIKKENS, M ;

VANHEEREVELD, AAMT ;

VOGELZANG, E ;

BOOSE, CA .

THIN SOLID FILMS, 1983, 108 (03) :229-238

← 1 2 →