High accuracy quartz crystal dew point sensor based on double cooling and double sensitive electrode

For active temperature controlled quartz resonant dew point sensors, the combination of Peltier and quartz crystal resonators (QCR) is a key factor in the design of sensor structures. A structure in which the Peltier and the QCR are surface to surface combined with single-sided cooling has unstable vibration when environmental parameters continuously change. In order to achieve continuous and accurate dew point measurement in a dynamically changing atmosphere, this paper presents a new structure based on double cooling and double sensitive surfaces. The Peltier is flexibly connected to the QCR non-electrode region using elastic thermal materials. The designed sensor has a dew point measurement test in an environment where there is a continuous change of humidity and temperature. The results show that the relative error is less than 0.06 degrees C when the cooling rate is 0.02 degrees C/s, compared to MICHELL S4000.