Effect of N2 Jet on Si Electrode Surface in Dielectric Barrier Discharge

被引:1
|
作者
Wang, Changquan [1 ]
机构
[1] Beijing Vocat Coll Labour & Social Secur, Dept Mech & Elect Engn, Beijing, Peoples R China
关键词
AIR PLASMA;
D O I
10.1088/1755-1315/440/2/022059
中图分类号
X [环境科学、安全科学];
学科分类号
08 ; 0830 ;
摘要
In order to investigate the effect of discharge gas jet on electrode surface, some dielectric barrier discharge (DBD) experiments were carried out on a laboratory-built DBD system using monocrystalline silicon (Si) electrode in air with or without N-2 jet. The effects of N-2 jet on Si electrode surface are analyzed by means of field emission scanning electron microscope (FESEM) and energy dispersive X-ray spectroscopy (EDS) attached to FESEM. The results show that Si electrode surface roughness and oxidation with N-2 jet are increased more than without N-2 jet. It can be used for texturing solar cells surface to improve power conversion efficiency.
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页数:6
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