Experimental and computational study of gas flow delivered by a rectangular microchannels leak

被引：11

作者：

Bergoglio, M. ^{[1
]}

Mari, D. ^{[1
]}

Chen, J. ^{[2
]}

Mohand, H. Si Hadj ^{[2
]}

Colin, S. ^{[2
]}

Barrot, C. ^{[2
]}

机构：

[1] Ist Nazl Ric Metrol INRIM, I-10135 Turin, Italy

[2] Univ Toulouse, ICA, F-31400 Toulouse, France

来源：

MEASUREMENT | 2015年 / 73卷

关键词：

Micro flowrates; Rectangular microchannels; Secondary standard leaks; Slip flow; Transition flow; PRIMARY STANDARD;

D O I：

10.1016/j.measurement.2015.06.011

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The gas flowrate through a rectangular microchannels device has been investigated within a collaboration between the Istituto Nazionale di Ricerca Metrologica from Torino and the Institut Clement Ader (ICA) from the University of Toulouse. The microdevice was characterized with different gas species as He, N-2, Ar, R12, CO2 and a mixture N-2/H-2 (95/5), in a wide range of pressure, to test its potential use as secondary gas flow standard in terms of ease of use and predictability of gas flowrate. The measurements of gas flowrates have been carried out in an inlet pressure range between 50 Pa and 100 kPa and with two different outlet conditions: vacuum (10 (6) Pa up to a few Pa according to the setup) and atmospheric pressure. Furthermore the temperature coefficient has been determined from measurements in a temperature range from 15 degrees C to 25 degrees C. The primary standards of both laboratories were compared and a semi-analytical model was used to predict the molar gas flowrate through the rectangular microchannels in the slip flow and early transition regimes. (C) 2015 Elsevier Ltd. All rights reserved.

引用

页码：551 / 562

页数：12

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