Applications of polyimide membranes to MEMS technology

被引：28

作者：

Shearwood, C

Harradine, MA

Birch, TS

Stevens, JC

机构：

[1] MEMS Unit, Dept. of Electron. and Elec. Eng., University of Sheffield, Sheffield, S1 3JD, Mappin Street

[2] Dept. of Med. Phys. and Clin. Eng., Royal Hallamshire Hospital, Sheffield S10 2JF, Glossop Road

来源：

MICROELECTRONIC ENGINEERING | 1996年 / 30卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(95)00306-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The fabrication of polyimide membranes on GaAs (001) substrates by bulk micro-machining is described. These membranes have diameters in the range of 1 mm to 8 mm and a thickness of 7 mu m. The predicted and measured performance of a representative number of membranes is presented; their application is illustrated with reference to a ''micro-speaker'' for use in a hearing aid.

引用

页码：547 / 550

页数：4

共 4 条

[1]

AFFANE W, 1995, SENSOR ACTUAT A-PHYS, V46, P584

[2] APPLICATIONS OF FLUOROCARBON POLYMERS IN MICROMECHANICS AND MICROMACHINING [J].