Optical emission spectroscopy study of plasma parameters in low-pressure hollow cathode plasma jet and planar magnetron powered by DC and pulsed DC supply

被引：11
作者：
Mishra, Himanshu [1 ]
Tichy, Milan [1 ]
Kudrna, Pavel [1 ]
机构：
[1] Charles Univ Prague, Fac Math & Phys, Prague 18000, Czech Republic
来源：
VACUUM | 2022年 / 205卷
关键词：
Optical emission spectroscopy; Hollow cathode plasma jet; Planar magnetron cathode system; DC; Pulsed DC; IONIZATION-RECOMBINATION; ELECTRON-TEMPERATURE; POPULATION-DENSITY; EXCITED IONS; KINETICS;
D O I：
10.1016/j.vacuum.2022.111413
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Optical emission spectroscopy (OES) has become a non-intrusive and versatile method for plasma parameters determination. Each spectral line in emission spectroscopy corresponds to an optical transition between two quantum levels of atom/molecule. The spectral line intensities are controlled by densities of species in various upper states. We calculated the electron temperature (T-e) and electron density (n(e)) in low-pressure discharge systems based on the modified Boltzmann equation and line intensity ratios. We have evaluated the mentioned plasma parameters in the low-pressure hollow cathode plasma jet (HC) and planar magnetron cathode system (PM) in the continuous DC and the pulsed-DC regime. We present the dependences of the electron temperature (T-e) and electron density (n(e)) on the applied power and the argon flow rate in the mentioned two systems together with a qualitative discussion of the obtained results.
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页数：8
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