In situ laser processing in a scanning electron microscope

被引：22

作者：

Roberts, Nicholas A. ^{[1
,3
]}

Magel, Gregory A. ^{[3
]}

Hartfield, Cheryl D. ^{[3
]}

Moore, Thomas M. ^{[3
]}

Fowlkes, Jason D. ^{[2
]}

Rack, Philip D. ^{[1
,2
]}

机构：

[1] Univ Tennessee, Dept Mat Sci & Engn, Knoxville, TN 37996 USA

[2] Oak Ridge Natl Lab, Ctr Nanophase Mat Sci, Oak Ridge, TN 37831 USA

[3] Omniprobe Inc, Dallas, TX 75238 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2012年 / 30卷 / 04期

基金：

美国国家科学基金会;

关键词：

BEAM-INDUCED DEPOSITION; NANOPARTICLE ARRAYS; THIN-FILMS; TEMPERATURE; COPPER; PHASE;

D O I：

10.1116/1.4731254

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Laser delivery probes using multimode fiber optic delivery and bulk focusing optics have been constructed and used for performing materials processing experiments within scanning electron microscope/focused ion beam instruments. Controlling the current driving a 915-nm semiconductor diode laser module enables continuous or pulsed operation down to sub-microsecond durations, and with spot sizes on the order of 50 mu m diameter, achieving irradiances at a sample surface exceeding 1 MW/cm(2). Localized laser heating has been used to demonstrate laser chemical vapor deposition of Pt, surface melting of silicon, enhanced purity, and resistivity via laser annealing of Au deposits formed by electron beam induced deposition, and in situ secondary electron imaging of laser induced dewetting of Au metal films on SiOx. (C) 2012 American Vacuum Society. [http://dx.doi.org/10.1116/1.4731254]

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