Reactive sputtering TiO2 films for surface coating of poly (dimethylsiloxane)

被引:19
作者
Niu, ZQ [1 ]
Jia, XY [1 ]
Zhang, WP [1 ]
Chen, WY [1 ]
Qian, KY [1 ]
机构
[1] Shanghai Jiao Tong Univ, Key Lab Thin Film & Micro Fabricat Technol, Minist Educ, Res Inst Micro Nanometer Sci & Technol, Shanghai 200030, Peoples R China
关键词
PDMS; TiO2; films; reactive sputtering; surface coating; XPS; contact angle; protein adsorption;
D O I
10.1016/j.apsusc.2005.04.014
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Titanium dioxide (TiO2) films were prepared on poly(dimethylsiloxane) (PDMS) substrate by direct current (DC) reactive sputtering to change surface physical properties of PDMS. The effects of the changes were investigated by using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) analysis, water contact angle measurements and protein adsorption tests. Improved wettability and reduced adsorption properties were observed on PDMS surface coated TiO2 films. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:2259 / 2264
页数:6
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