Submicron imaging with a planar silver lens

被引:109
作者
Melville, DOS [1 ]
Blaikie, RJ [1 ]
Wolf, CR [1 ]
机构
[1] Univ Canterbury, Dept Elect & Comp Engn, MacDonald Inst Adv Mat & Nanotechnol, Christchurch 1, New Zealand
关键词
D O I
10.1063/1.1757644
中图分类号
O59 [应用物理学];
学科分类号
摘要
Optical imaging through a thin planar silver layer has been achieved by utilizing near-field lithography techniques. A 120 nm thick silver lens that was placed 60 nm below a patterned mask, imaged the mask's features onto a photosensitive material located 60 nm below the silver. The entire structure was exposed from above with a mercury lamp. Features sizes as small as 350 nm (at a 700 nm period) were imaged onto the photosensitive material, demonstrating the lensing ability of the planar silver slab. (C) 2004 American Institute of Physics.
引用
收藏
页码:4403 / 4405
页数:3
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