Radial structure of surface-wave sustained plasmas

被引:2
作者
Denysenko, IB
Azarenkov, NA
Yu, MY
机构
[1] Ruhr Univ Bochum, Inst Theoret Phys 1, D-44780 Bochum, Germany
[2] Kharkiv Natl Univ, Dept Phys & Technol, UA-61077 Kharkov, Ukraine
关键词
D O I
10.1238/Physica.Regular.065a00076
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The structure of a steady-state surface-wave sustained cylindrical argon plasma is investigated theoretically by taking into account electron heat transport. The radial profiles of the plasma density, temperature, velocity, as well as the the density of the 3p(5)6d excited-state argon atoms are calculated. The effects of different models of the electron heat flux and their boundary conditions are also investigated. The results are compared with existing experiments and theories.
引用
收藏
页码:76 / 82
页数:7
相关论文
共 31 条
[1]   Nonlinearity: Basis for self-consistent modeling of surface wave produced plasmas in diffusion controlled regimes [J].
Aliev, YM ;
Grosse, S ;
Schluter, H ;
Shivarova, A .
PHYSICS OF PLASMAS, 1996, 3 (08) :3162-3175
[2]   SPATIALLY AVERAGED (GLOBAL) MODEL OF TIME MODULATED HIGH-DENSITY ARGON PLASMAS [J].
ASHIDA, S ;
LEE, C ;
LIEBERMAN, MA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (05) :2498-2507
[3]   The radial structure of a plasma column sustained by a surface wave [J].
Azarenkov, NA ;
Denysenko, IB ;
Gapon, AV ;
Johnston, TW .
PHYSICS OF PLASMAS, 2001, 8 (05) :1467-1481
[4]   SPECTRAL AND NOISE CHARACTERISTICS OF A XENON MICROWAVE-INDUCED PLASMA LAMP [J].
BEAUCHEMIN, D ;
HUBERT, J ;
MOISAN, M .
APPLIED SPECTROSCOPY, 1986, 40 (03) :379-385
[5]  
Biberman L. M., 1987, KINETICS NONEQUILIBR
[6]  
Brown SC, 1966, Introduction to Electrical Discharges in Gases
[7]   DUAL-MODE RADIO-FREQUENCY MICROWAVE PLASMA DEPOSITION OF AMORPHOUS-SILICON OXIDE THIN-FILMS [J].
ETEMADI, R ;
GODET, C ;
KILDEMO, M ;
BOUREE, JE ;
BRENOT, R ;
DREVILLON, B .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1995, 187 :70-74
[8]   THEORY OF A PLASMA-COLUMN SUSTAINED BY A SURFACE-WAVE [J].
FERREIRA, CM .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1981, 14 (10) :1811-1830
[9]   THE SIMILARITY LAWS FOR THE MAINTENANCE FIELD AND THE ABSORBED POWER PER ELECTRON IN LOW-PRESSURE SURFACE-WAVE PRODUCED PLASMAS AND THEIR EXTENSION TO HF PLASMAS IN GENERAL [J].
FERREIRA, CM ;
MOISAN, M .
PHYSICA SCRIPTA, 1988, 38 (03) :382-399
[10]  
FERREIRA CM, 1999, NATO ASI SERIES B, V302