[1] KIST Europe, Microfluid Grp, Campus E7-1, D-66111 Saarbrucken, Germany
[2] NIST, Ctr Nanoscale Sci & Technol, 100 Bur Dr,MS 6201, Gaithersburg, MD 20899 USA
[3] Brno Univ Technol, Cent European Inst Technol CEITEC, CZ-61600 Brno, Czech Republic
[4] Northwestern Polytech Univ, Sch Mech Engn, Dept Microsyst Engn, 127 West Youyi Rd, Xian 710072, Shaanxi, Peoples R China