Factors affecting the measurement resolution of super-resolution techniques based on speckle interferometry

A technique is proposed to observe the shape of an object beyond the diffraction limit by analysing the phase of light based on speckle interferometry. Several conditions must be considered during the measurement process to use this technique to observe detailed microstructure. In this study, the primary factors in the measurement process are investigated, and the influence of each factor on the measurement resolution is evaluated. Moreover, the optimum conditions for each factor are proposed. Under appropriate measurement conditions, this measurement technique enables the observation of microstructure beyond the diffraction limit with a high resolution of approximately 100 nm. By proposing proper measurement conditions for this new method of observing beyond the diffraction limit by detecting the phase of light, an environment is created to extend the fields of use including bio-related technologies.