Pulse electrodeposition of 2.4 T Co37Fe63 alloys at nanoscale for magnetic recording application

被引：25

作者：

Brankovic, SR ^{[1
]}

Yang, XM

Klemmer, TJ

Seigler, M

机构：

[1] Univ Houston, Dept Elect & Comp Engn, Houston, TX 77204 USA

[2] Seagate Res Ctr, Pittsburgh, PA 15222 USA

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2006年 / 42卷 / 02期

关键词：

Co-Fe alloys; corrosion; electrodeposition; pulse deposition; Saccharin;

D O I：

10.1109/TMAG.2005.861778

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Pulse deposition of 2.4 T Co-37 Fe-63 alloy in photoresist features with 40 nm critical dimension and high aspect ratio is presented. The design of the pulse deposition parameters is described in terms of the transport limitations through the diffusion layer, electrochemical interface stability with respect to Fe(OH)3 precipitation, and the optimum conditions for additive (Saccharin) adsorption. The alloy grain size and crystal structure in the nanoconfined electrode geometry is compared versus the thin film and relevant implications for magnetic recording are discussed. The 2.4 T Co38Fe61Pd1 alloy is introduced as a possible way to improve the corrosion properties of 2.4 T Co37Fe63 alloy.

引用

页码：132 / 139

页数：8

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