Annealing Effect on the Stability of Platinum Thin Films Covered by SiO2 or SiNx Layer

被引：0

作者：

Xiao, Li ^{[1
]}

Zhao, Zhan ^{[1
]}

Du, Lidong ^{[1
]}

Wu, Shaohua ^{[1
]}

Liu, Qimin ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing, Peoples R China

来源：

2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013) | 2013年

关键词：

component; Platinum; Annealing; Pressure sensor; Resistance;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

This study examined the crystal structure and the surface morphology between Pt and SiO2 or SiNx as a glue layer according to the annealing treatment. The thermal temperature make the surface morphology of the Pt films changed, and the characteristics of Pt thin film resistors under different annealing temperature also been changed. The resistance of the film will decrease after thermal treatment which the annealing temperature is lower than 480 degrees C, and the resistor will increase sharply after annealing above 500 degrees C. SiO2 or SiNx layers covered on Pt thin films also have an effect on the characteristics of Pt thin films.

引用

页码：352 / 355

页数：4

共 50 条

[31] Effect of annealing on the structure and magnetic properties of CoFe2O4:SiO2 nanocomposites [J].

Dippong, Thomas ;

Cadar, Oana ;

Levei, Erika Andrea ;

Leostean, Cristian ;

Tudoran, Lucian Barbu .

CERAMICS INTERNATIONAL, 2017, 43 (12) :9145-9152

[32] Silicon-substituted hydroxyapatite thin films: Effect of annealing temperature on coating stability andbioactivity [J].

Thian, ES ;

Huang, J ;

Best, SM ;

Barber, ZH ;

Bonfield, W .

JOURNAL OF BIOMEDICAL MATERIALS RESEARCH PART A, 2006, 78A (01) :121-128

[33] High quality ZnO film formation by CO2 laser annealing of buried films in SiO2 matrix [J].

Yamasaki, K. ;

Ikenoue, H. ;

Shimogaki, T. ;

Watanabe, Y. ;

Nakamura, D. ;

Okada, T. .

LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING (LAMOM) XIX, 2014, 8967

[34] Tailoring oxygen vacancies in Ga2O3 thin films and controlled formation of Ga2O3/SiO2 heterostructures via annealing [J].

Al Ghaithi, Asma O. ;

Taha, Inas ;

Ansari, Sumayya M. ;

Rajput, Nitul ;

Mohammad, Baker ;

Aldosari, Haila M. .

VACUUM, 2025, 231

[35] Effect of annealing on CoSi2 thin films prepared by magnetron sputtering [J].

Cheng, FX ;

Jiang, CH ;

Wu, JS .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2005, 119 (01) :61-64

[36] Annealing Effect on One Step Electrodeposited CuSbSe2 Thin Films [J].

Abouabassi, Khadija ;

Atourki, Lahoucine ;

Sala, Andrea ;

Ouafi, Mouaad ;

Boulkaddat, Lahcen ;

Ait Hssi, Abderrahim ;

Labchir, Nabil ;

Bouabid, Khalid ;

Almaggoussi, Abdelmajid ;

Gilioli, Edmondo ;

Ihlal, Ahmed .

COATINGS, 2022, 12 (01)

[37] Influence of annealing conditions on the chemical states of InP/SiO2 nanocomposite films deposited by RF magnetron cosputtering [J].

Ding, RQ ;

Zhou, GR ;

Wang, H ;

Yang, HD ;

Hu, L .

FOURTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS, 2000, 4086 :213-216

[38] Comparative study of air and vacuum annealing atmosphere towards Pt/Ti-W/SiO2 stability [J].

Simon, Pardis ;

Nazon, Julien ;

Domenichini, Bruno ;

Bourgeois, Sylvie .

THIN SOLID FILMS, 2013, 548 :138-142

[39] Atomic Layer Deposition of SiO2 for the Performance Enhancement of Fin Field Effect Transistors [J].

Endo, Kazuhiko ;

Ishikawa, Yuki ;

Matsukawa, Takashi ;

Liu, Yongxun ;

O'uchi, Shin-ichi ;

Sakamoto, Kunihiro ;

Tsukada, Junichi ;

Yamauchi, Hiromi ;

Masahara, Meishoku .

JAPANESE JOURNAL OF APPLIED PHYSICS, 2013, 52 (11)

[40] Effect of Annealing on the Electrical Properties of CuxS Thin Films [J].

Sabah, Fayroz A. ;

Ahmed, Naser M. ;

Hassan, Z. ;

Rasheed, Hiba S. .

5TH INTERNATIONAL CONFERENCE ON RECENT ADVANCES IN MATERIALS, MINERALS AND ENVIRONMENT (RAMM) & 2ND INTERNATIONAL POSTGRADUATE CONFERENCE ON MATERIALS, MINERAL AND POLYMER (MAMIP), 2016, 19 :15-20

← 1 2 3 4 5 →