A general procedure for thermomechanical calibration of nano/micro-mechanical resonators

被引：132
作者：
Hauer, B. D. [1 ]
Doolin, C. [1 ]
Beach, K. S. D. [1 ]
Davis, J. P. [1 ]
机构：
[1] Univ Alberta, Dept Phys, Edmonton, AB T6G 2G7, Canada
来源：
ANNALS OF PHYSICS | 2013年 / 339卷
基金：
加拿大自然科学与工程研究理事会; 加拿大创新基金会;
关键词：
Thermomechanical calibration; MEMS; NEMS; Classical resonator; Damped Brownian motion; SPRING CONSTANT; MASS; CANTILEVERS; NOISE; SENSITIVITY; FABRICATION; OSCILLATOR; TRANSDUCER; ACTUATION; GRAPHENE;
D O I：
10.1016/j.aop.2013.08.003
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
We describe a general procedure to calibrate the detection of a nano/micro-mechanical resonator's displacement as it undergoes thermal Brownian motion. A brief introduction to the equations of motion for such a resonator is presented, followed by a detailed derivation of the corresponding power spectral density (PSD) function, which is identical in all situations aside from a system-dependent effective mass value. The effective masses for a number of different resonator geometries are determined using both finite element method (FEM) modeling and analytical calculations. (C) 2013 Elsevier Inc. All rights reserved.
引用
收藏
页码：181 / 207
页数：27
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