A general procedure for thermomechanical calibration of nano/micro-mechanical resonators

被引：135

作者：

Hauer, B. D. ^{[1
]}

Doolin, C. ^{[1
]}

Beach, K. S. D. ^{[1
]}

Davis, J. P. ^{[1
]}

机构：

[1] Univ Alberta, Dept Phys, Edmonton, AB T6G 2G7, Canada

来源：

ANNALS OF PHYSICS | 2013年 / 339卷

基金：

加拿大自然科学与工程研究理事会; 加拿大创新基金会;

关键词：

Thermomechanical calibration; MEMS; NEMS; Classical resonator; Damped Brownian motion; SPRING CONSTANT; MASS; CANTILEVERS; NOISE; SENSITIVITY; FABRICATION; OSCILLATOR; TRANSDUCER; ACTUATION; GRAPHENE;

D O I：

10.1016/j.aop.2013.08.003

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We describe a general procedure to calibrate the detection of a nano/micro-mechanical resonator's displacement as it undergoes thermal Brownian motion. A brief introduction to the equations of motion for such a resonator is presented, followed by a detailed derivation of the corresponding power spectral density (PSD) function, which is identical in all situations aside from a system-dependent effective mass value. The effective masses for a number of different resonator geometries are determined using both finite element method (FEM) modeling and analytical calculations. (C) 2013 Elsevier Inc. All rights reserved.

引用

页码：181 / 207

页数：27

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