Synthesis and characterization of TiO2 nanotube film on fluorine-doped tin oxide glass

被引：10
作者：
Wang, Jinshu [1 ]
Wang, Hong [1 ]
Li, Hongyi [1 ]
Wu, Junshu [1 ]
机构：
[1] Beijing Univ Technol, Sch Mat & Engn, Key Lab Funct Mat, Beijing 100124, Peoples R China
来源：
THIN SOLID FILMS | 2013年 / 544卷
基金：
中国国家自然科学基金;
关键词：
TiO2; nanotube; Ti film; Anodization; Impedance; TRANSPARENT CONDUCTING OXIDE; ELECTROPHORETIC DEPOSITION; NANOWIRE ARRAYS; ANODIZATION; PERFORMANCE; FABRICATION; OXIDATION;
D O I：
10.1016/j.tsf.2013.03.104
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Highly ordered TiO2 nanotube array films were fabricated on conducting fluorine-doped tin oxide (FTO) glass substrate in NH4HF2/glycol electrolyte via anodization of Ti film, which was deposited by direct current magnetron sputtering. Ti films obtained by direct current magnetron sputtering method have three growth regions and that deposited at 410 degrees C has smooth surface which is favorable for the anodization. The anodization voltage affects the diameter of TiO2 nanotube and the reason has been discussed. A 12.5 mu m-thick TiO2 nanotube array film has been obtained and exhibits a high transmittance of 32% in the visible light range. The bandgap of the thin film is calculated to be 3.08 eV based on the UV-vis transmission spectra, and its tail extends to 2.94 eV. The electrochemical impedance spectroscopy indicates that the impedance TiO2 nanotube film decreases after light illumination. (C) 2013 Elsevier B. V. All rights reserved.
引用
收藏
页码：276 / 280
页数：5
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