A novel approach towards calibrated measurement of trace gases using metal oxide semiconductor sensors

被引：66

作者：

Schultealbert, Caroline ^{[1
]}

Baur, Tobias ^{[1
]}

Schuetze, Andreas ^{[1
]}

Boettcher, Stefan ^{[2
]}

Sauerwald, Tilman ^{[1
]}

机构：

[1] Univ Saarland, Lab Measurement Technol, Saarbrucken, Germany

[2] Univ Saarland, Pharmaceut & Med Chem, Saarbrucken, Germany

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2017年 / 239卷

关键词：

Metal oxide semiconductor gas sensor; In field calibration; Indoor air quality; TVOC quantification; Model based temperature cycled operation; Trace level detection; AIR;

D O I：

10.1016/j.snb.2016.08.002

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We present a method for quantitative measurements of metal oxide semiconductor gas sensors (MOS) which is based on relaxation of surface states using temperature cycled operation (TCO). The method provides sensor response to toluene in form of a power law and a reliable quantification in the concentration range of about 10 ppb to 10 ppm. For the calibration of the sensor, a method is developed based on the equilibrium vapour headspace over a liquid solution of toluene and squalane yielding reliable concentrations in the range of 10 ppb to 600 ppm. The calibration method was shown to be stable under ambient conditions and thus to be applicable for field calibration of gas sensors. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：390 / 396

页数：7

共 23 条

[1]

[Anonymous], 2001, THE PROPERTIES OF GA

[2]

Atkins P.W., 2001, PHYS CHEM, Vseventh

[3] Conduction model of metal oxide gas sensors [J].

Barsan, N ;

Weimar, U .

JOURNAL OF ELECTROCERAMICS, 2001, 7 (03) :143-167

[4]

Bastuck M., 2015, 16TH INT SYMP OLFACT

[5] Optimization of temperature cycled operation of semiconductor gas sensors [J].

Baur, Tobias ;

Schuetze, Andreas ;

Sauerwald, Tilman .

TM-TECHNISCHES MESSEN, 2015, 82 (04) :187-195

[6] Surface state trapping models for SnO2-based microhotplate sensors [J].

Ding, JH ;

McAvoy, TJ ;

Cavicchi, RE ;

Semancik, S .

SENSORS AND ACTUATORS B-CHEMICAL, 2001, 77 (03) :597-613

[7] Development of ultra-low-power consumption MOX sensors with ppb-level VOC detection capabilities for emerging applications [J].

Elmi, I. ;

Zampolli, S. ;

Cozzani, E. ;

Mancarella, F. ;

Cardinali, G. C. .

SENSORS AND ACTUATORS B-CHEMICAL, 2008, 135 (01) :342-351

[8] A TEST SYSTEM FOR GAS SENSORS [J].

ENDRES, HE ;

JANDER, HD ;

GOTTLER, W .

SENSORS AND ACTUATORS B-CHEMICAL, 1995, 23 (2-3) :163-172

[9] Simultaneous determination of toluene diffusion coefficient in air from thin tube evaporation and sessile drop evaporation on a solid surface [J].

Erbil, HY ;

Avci, Y .

LANGMUIR, 2002, 18 (13) :5113-5119

[10] GROUP-CONTRIBUTION ESTIMATION OF ACTIVITY-COEFFICIENTS IN NONIDEAL LIQUID-MIXTURES [J].

FREDENSLUND, A ;

JONES, RL ;

PRAUSNITZ, JM .

AICHE JOURNAL, 1975, 21 (06) :1086-1099

← 1 2 3 →