Fabrication of ridge waveguides in zinc-substituted lithium niobate by means of ion-beam enhanced etching

被引：32

作者：

Hartung, Holger ^{[1
]}

Kley, Ernst-Berhard ^{[1
]}

Tuennermann, Andreas ^{[1
]}

Gischkat, Thomas ^{[2
]}

Schrempel, Frank ^{[2
]}

Wesch, Werner ^{[2
]}

机构：

[1] Univ Jena, Inst Appl Phys, D-07743 Jena, Germany

[2] Univ Jena, Inst Solid State Phys, D-07743 Jena, Germany

来源：

OPTICS LETTERS | 2008年 / 33卷 / 20期

关键词：

D O I：

10.1364/OL.33.002320

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present results on the fabrication and characterization of ridge waveguides in zinc-substituted lithium niobate. High-quality waveguides were fabricated by a combination of liquid-phase epitaxy and multiple applications of ion-beam enhanced etching. The two major demands on ridge waveguides, a very low side-wall roughness and a rectangle shape with side-wall angles close to 90 degrees, were realized simultaneously by using this technique. Single-mode waveguiding at a wavelength of 1064 nm was demonstrated with attenuation values of 0.9 dB/cm. (C) 2008 Optical Society of America

引用

页码：2320 / 2322

页数：3

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