Optical in situ monitoring of hydrogen desorption from Ge(100) surfaces

被引:5
作者
Barrigon, Enrique [1 ]
Brueckner, Sebastian [2 ,3 ]
Supplie, Oliver [2 ]
Kleinschmidt, Peter [2 ,4 ]
Rey-Stolle, Ignacio [1 ]
Hannappel, Thomas [2 ,3 ,4 ]
机构
[1] Univ Politecn Madrid, Inst Energia Solar, E-28040 Madrid, Spain
[2] Helmholtz Zentrum Berlin, D-14109 Berlin, Germany
[3] Tech Univ Ilmenau, Inst Phys, D-98684 Ilmenau, Germany
[4] CiS Forschungsinst Mikrosensor & Photovolta GmbH, D-99099 Erfurt, Germany
关键词
SCANNING-TUNNELING-MICROSCOPY; REFLECTANCE DIFFERENCE SPECTROSCOPY; ANISOTROPY SPECTROSCOPY; FILM GROWTH; GERMANIUM; KINETICS; ADSORPTION; DEPOSITION; SI(100); SI(001);
D O I
10.1063/1.4798248
中图分类号
O59 [应用物理学];
学科分类号
摘要
Molecular hydrogen strongly interacts with vicinal Ge(100) surfaces during preparation in a metal organic vapor phase epitaxy reactor. According to X-ray photoemission spectroscopy and Fourier-transform infrared spectroscopy results, we identify two characteristic reflection anisotropy (RA) spectra for H-free and monohydride-terminated vicinal Ge(100) surfaces. RAS allows in situ monitoring of the surface termination and enables spectroscopic hydrogen kinetic desorption studies on the Ge(100) surface. Comparison of evaluated values for the activation energy and the pre-exponential factor of H desorption evaluated at different photon energies reflects that H unevenly affects the shape of the RA spectrum. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4798248]
引用
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页数:4
相关论文
共 36 条
  • [1] Barrigon E., J CRYST GROWTH
  • [2] SCANNING-TUNNELING-MICROSCOPY OF THE INTERACTION OF HYDROGEN WITH SILICON SURFACES
    BOLAND, JJ
    [J]. ADVANCES IN PHYSICS, 1993, 42 (02) : 129 - 171
  • [3] Anomalous double-layer step formation on Si(100) in hydrogen process ambient
    Brueckner, Sebastian
    Doescher, Henning
    Kleinschmidt, Peter
    Supplie, Oliver
    Dobrich, Anja
    Hannappel, Thomas
    [J]. PHYSICAL REVIEW B, 2012, 86 (19)
  • [4] In situ control of As dimer orientation on Ge(100) surfaces
    Brueckner, Sebastian
    Supplie, Oliver
    Barrigon, Enrique
    Luczak, Johannes
    Kleinschmidt, Peter
    Rey-Stolle, Ignacio
    Doescher, Henning
    Hannappel, Thomas
    [J]. APPLIED PHYSICS LETTERS, 2012, 101 (12)
  • [5] Ge(100) surfaces prepared in vapor phase epitaxy process ambient
    Brueckner, Sebastian
    Barrigon, Enrique
    Supplie, Oliver
    Kleinschmidt, Peter
    Dobrich, Anja
    Loebbel, Claas
    Rey-Stolle, Ignacio
    Doescher, Henning
    Hannappel, Thomas
    [J]. PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2012, 6 (04): : 178 - 180
  • [6] In situ investigation of hydrogen interacting with Si(100)
    Brueckner, Sebastian
    Doescher, Henning
    Kleinschmidt, Peter
    Hannappel, Thomas
    [J]. APPLIED PHYSICS LETTERS, 2011, 98 (21)
  • [8] Atomic layer deposition of high-κ dielectric for germanium MOS applications-substrate surface preparation
    Chui, CO
    Kim, H
    McIntyre, PC
    Saraswat, KC
    [J]. IEEE ELECTRON DEVICE LETTERS, 2004, 25 (05) : 274 - 276
  • [9] SURFACE PI-BONDING AND THE NEAR-1ST-ORDER DESORPTION-KINETICS OF HYDROGEN FROM GE(100)2X1
    DEVELYN, MP
    COHEN, SM
    ROUCHOUZE, E
    YANG, YL
    [J]. JOURNAL OF CHEMICAL PHYSICS, 1993, 98 (04) : 3560 - 3563
  • [10] Si(100) surfaces in a hydrogen-based process ambient
    Doescher, Henning
    Dobrich, Anja
    Brueckner, Sebastian
    Kleinschmidt, Peter
    Hannappel, Thomas
    [J]. APPLIED PHYSICS LETTERS, 2010, 97 (15)