Scanning X-ray nanodiffraction: from the experimental approach towards spatially resolved scattering simulations

被引：2

作者：

Dubslaff, Martin ^{[1
]}

Hanke, Michael ^{[1
]}

Patommel, Jens ^{[2
]}

Hoppe, Robert ^{[2
]}

Schroer, Christian G. ^{[2
]}

Schoeder, Sebastian ^{[3
]}

Burghammer, Manfred ^{[3
]}

机构：

[1] Paul Drude Inst Festkorperelekt, D-10117 Berlin, Germany

[2] Tech Univ Dresden, Inst Strukturphys, D-01069 Dresden, Germany

[3] European Synchrotron Radiat Facil, F-38043 Grenoble, France

来源：

NANOSCALE RESEARCH LETTERS | 2012年 / 7卷

关键词：

Quantum dots; Quantum dot molecules; X-ray nanodiffraction; X-ray scattering simulation; DIFFRACTION; PTYCHOGRAPHY; MICROSCOPY; ISLANDS; OBJECTS; STRAIN;

D O I：

10.1186/1556-276X-7-553

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

An enhancement on the method of X-ray diffraction simulations for applications using nanofocused hard X-ray beams is presented. We combine finite element method, kinematical scattering calculations, and a spot profile of the X-ray beam to simulate the diffraction of definite parts of semiconductor nanostructures. The spot profile could be acquired experimentally by X-ray ptychography. Simulation results are discussed and compared with corresponding X-ray nanodiffraction experiments on single SiGe dots and dot molecules.

引用

页数：8

共 21 条

[11] X-ray Nanodiffraction on a Single SiGe Quantum Dot inside a Functioning Field-Effect Transistor [J].

Hrauda, Nina ;

Zhang, Jianjun ;

Wintersberger, Eugen ;

Etzelstorfer, Tanja ;

Mandl, Bernhard ;

Stangl, Julian ;

Carbone, Dina ;

Holy, Vaclav ;

Jovanovic, Vladimir ;

Biasotto, Cleber ;

Nanver, Lis K. ;

Moers, Juergen ;

Gruetzmacher, Detlev ;

Bauer, Guenther .

NANO LETTERS, 2011, 11 (07) :2875-2880

[12] Superresolution imaging via ptychography [J].

Maiden, Andrew M. ;

Humphry, Martin J. ;

Zhang, Fucai ;

Rodenburg, John M. .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2011, 28 (04) :604-612

[13] Electron ptychography. I. Experimental demonstration beyond the conventional resolution limits [J].

Nellist, PD ;

Rodenburg, JM .

ACTA CRYSTALLOGRAPHICA SECTION A, 1998, 54 :49-60

[14] Hard-x-ray lensless imaging of extended objects [J].

Rodenburg, J. M. ;

Hurst, A. C. ;

Cullis, A. G. ;

Dobson, B. R. ;

Pfeiffer, F. ;

Bunk, O. ;

David, C. ;

Jefimovs, K. ;

Johnson, I. .

PHYSICAL REVIEW LETTERS, 2007, 98 (03)

[15] Coherent x-ray diffraction imaging with nanofocused illumination [J].

Schroer, C. G. ;

Boye, R. ;

Feldkamp, J. M. ;

Patommel, J. ;

Schropp, A. ;

Schwab, A. ;

Stephan, S. ;

Burghammer, M. ;

Schoeder, S. ;

Riekel, C. .

PHYSICAL REVIEW LETTERS, 2008, 101 (09)

[16] Non-destructive and quantitative imaging of a nano-structured microchip by ptychographic hard X-ray scanning microscopy [J].

Schropp, A. ;

Boye, P. ;

Goldschmidt, A. ;

Hoenig, S. ;

Hoppe, R. ;

Patommel, J. ;

Rakete, C. ;

Samberg, D. ;

Stephan, S. ;

Schoeder, S. ;

Burghammer, M. ;

Schroer, C. G. .

JOURNAL OF MICROSCOPY, 2011, 241 (01) :9-12

[17] Hard x-ray nanobeam characterization by coherent diffraction microscopy [J].

Schropp, A. ;

Boye, P. ;

Feldkamp, J. M. ;

Hoppe, R. ;

Patommel, J. ;

Samberg, D. ;

Stephan, S. ;

Giewekemeyer, K. ;

Wilke, R. N. ;

Salditt, T. ;

Gulden, J. ;

Mancuso, A. P. ;

Vartanyants, I. A. ;

Weckert, E. ;

Schoeder, S. ;

Burghammer, M. ;

Schroer, C. G. .

APPLIED PHYSICS LETTERS, 2010, 96 (09)

[18]

Software MSC, 2009, MSC MARC MENT SOFTW

[19] High-resolution scanning x-ray diffraction microscopy [J].

Thibault, Pierre ;

Dierolf, Martin ;

Menzel, Andreas ;

Bunk, Oliver ;

David, Christian ;

Pfeiffer, Franz .

SCIENCE, 2008, 321 (5887) :379-382

[20] Strain and composition in SiGe nanoscale islands studied by x-ray scattering [J].

Wiebach, T ;

Schmidbauer, M ;

Hanke, M ;

Raidt, H ;

Köhler, R ;

Wawra, H .

PHYSICAL REVIEW B, 2000, 61 (08) :5571-5578

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