Low-loss on-chip transmission lines with micro-patterned artificial dielectric shields

被引:5
作者
Ma, Y. [1 ]
Rejaei, B. [1 ]
Zhuang, Y. [2 ]
机构
[1] Deflt Univ Technol, Delft Inst Microsyst & Nanoelect DIMES, Elect Res Lab ELCA, Delft, Netherlands
[2] Wright State Univ, Dept Elect Engn, Dayton, OH 45435 USA
关键词
D O I
10.1049/el:20081324
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Low-loss coplanar waveguide (CPW) transmission lines integrated on a standard (5-10 Omega . cm) silicon substrate are realised by using an artificial dielectric shield with a very high in-plane dielectric constant. The shield consists of a 30 nm-thick Al2O3 film sandwiched by two 100 nm-thick aluminium layers patterned into lattices of mu m-size elements. The individual metallic elements are micro-patterned to suppress the flow of eddy currents at microwave frequencies. Inserted below the CPW, the shield blocks thee electric field of the line from entering the silicon substrate. The resulting line attenuation (measured up to 25 GHz) is comparable to that of identical CPWs built oil a high-resistivity silicon wafer.
引用
收藏
页码:913 / 915
页数:3
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