Measurement of absolute displacement by a double-modulation technique based on a Michelson interferometer

被引:5
作者
Chang, LW [1 ]
Chien, PY
Lee, CT
机构
[1] Natl Cent Univ, Inst Opt Sci, Chungli 32054, Taiwan
[2] Chung Shan Inst Sci & Technol, Ctr Mat Res, Tao Yuan, Taiwan
关键词
D O I
10.1364/AO.38.002843
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A novel method is presented for of measuring absolute displacement with a synthesized wavelength interferometer. The optical phase of the interferometer is simultaneously modulated with a frequency-modulated laser diode and optical path-length difference. The error signal originating from the intensity modulation of the source is eliminated by a signal processing circuit. In addition, a lock-in technique is used to demodulate the envelope of the interferometric signal. The displacement signal is derived by the self-mixing technique. (C) 1999 Optical Society of America OCIS codes: 120.0120, 120.3180.
引用
收藏
页码:2843 / 2847
页数:5
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