Effect of SiNx interlayer thickness on adhesion and friction properties of diamond-like carbon films

被引：11

作者：

Chen, Qingyun ^{[1
]}

Zeng, Chen ^{[1
]}

Xu, Ming ^{[2
]}

Yuan, Huan ^{[2
]}

Lv, Huiyi ^{[1
]}

Wang, Zaihong ^{[1
]}

Wang, Xuefei ^{[1
]}

机构：

[1] Southwest Univ Sci & Technol, Fundamental Sci Nucl Wastes & Environm Safety Lab, Mianyang 621010, Peoples R China

[2] Southwest Univ Nationalities, Dept Elect & Informat Engn, Chengdu 610041, Sichuan, Peoples R China

来源：

基金：

中国国家自然科学基金;

关键词：

DLC film; SiNx interlayer; Interlayer thickness; Adhesion; TRIBOLOGICAL PROPERTIES; DLC COATINGS; THIN-FILMS; NANOSCRATCH BEHAVIORS; NANO-SCRATCH; RAMAN; NITROGEN; NANOINDENTATION; GROWTH; METAL;

D O I：

10.1016/j.diamond.2019.01.024

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A suitable interlayer thickness is critical to reduce film mismatch and roughness. In this text, diamond-like carbon (DLC) films with different SiNx interlayer thicknesses were successfully synthesized on Si (100) substrates by radio frequency (RF) and direct current (DC) magnetron sputtering method. The effect of SiNx interlayer thickness on surface morphology, adhesion, tribological and mechanical properties of DLC films was investigated. The results show that, due to the use of SiNx interlayer in the DLC films, the adhesion is significantly enhanced, the surface roughness is increased, and the spa content and modulus are lowered. When the SiNx interlayer is introduced, the intemal stress and the roughness decrease first decrease and then increase. The reason may be related to the accumulation of nitrogen vacancy centers (NVC). A sample of about 10 nm SiNx interlayer was found to have the best combination of tribology, mechanical properties, and surface roughness.

引用

页码：186 / 193

页数：8

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