共 50 条
[42]
Quality Factor Optimization of Composite Piezoelectric Single-Crystal Silicon MEMS Resonators
[J].
2015 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS),
2015,
[43]
Orthogonal Anisotropic Sensing and Actuating Characteristics of a 1-3 PZT Piezoelectric Microfiber Composite
[J].
Journal of Electronic Materials,
2020, 49
:4903-4909