A passive humidity monitoring system for in situ remote wireless testing of micropackages

被引:71
作者
Harpster, TJ [1 ]
Hauvespre, S [1 ]
Dokmeci, MR [1 ]
Najafi, K [1 ]
机构
[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA
关键词
anodic bonding; hermetic; humidity; packaging; passive; wireless;
D O I
10.1109/84.982864
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reports a small passive wireless humidity monitoring system (HMS) for continuous remote monitoring of humidity changes inside miniature hermetic packages, presents its application in determining hermeticity of an implantable biomedical package, and presents long-term performance results obtained from packages implanted in guinea pigs. This 7 x 1.2 x 1.5 mm(3) system consists of a high-sensitivity capacitive humidity sensor that forms an LC tank circuit together with a hybrid coil wound around a ferrite substrate. The resonant frequency of the circuit changes when the humidity sensor capacitance changes in response to changes in humidity. The HMS can resolve humidity changes of +/-2.5% RH over a 2-cm range. The resolution is sufficient enough to monitor internal package humidity for either in vitro or in vivo testing.
引用
收藏
页码:61 / 67
页数:7
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