Visually testing the dynamic character of a blazed-angle adjustable grating by digital holographic microscopy

被引：10
作者：
Qin, Chuan [1 ,2 ]
Zhao, Jianlin [1 ,2 ]
Di, Jianglei [1 ,2 ]
Wang, Le [1 ,2 ]
Yu, Yiting [3 ]
Yuan, Weizheng [3 ]
机构：
[1] Northwestern Polytech Univ, Inst Opt Informat Sci & Technol, Xian 710072, Peoples R China
[2] Northwestern Polytech Univ, Sch Sci, Shaanxi Key Lab Opt Informat Technol, Xian 710072, Peoples R China
[3] Northwestern Polytech Univ, Sch Mechatron, Shaanxi Key Lab Micro & Nano Electromech Syst, Xian 710072, Peoples R China
来源：
APPLIED OPTICS | 2009年 / 48卷 / 05期
关键词：
MICROELECTROMECHANICAL SYSTEMS; CONFOCAL MICROSCOPY;
D O I：
10.1364/AO.48.000919
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We employed digital holographic microscopy to visually test microoptoelectromechanical systems (MOEMS). The sample is a blazed-angle adjustable grating. Considering the periodic structure of the sample, a local area unwrapping method based on a binary template was adopted to demodulate the fringes obtained by referring to a reference hologram. A series of holograms at different deformation states due to different drive voltages were captured to analyze the dynamic character of the MOEMS, and the uniformity of different microcantilever beams was also inspected. The results show this testing method is effective for a periodic structure. (C) 2009 Optical Society of America
引用
收藏
页码：919 / 923
页数：5
相关论文
共 18 条
  • [1] Single fiber confocal microscope with a two-axis gimbaled MEMS scanner for cellular imaging
    Carlson Maitland, Kristen
    Shin, Hyun Joon
    Ra, Hyejun
    Lee, Daesung
    Solgaard, Olav
    Richards-Kortum, Rebecca
    [J]. OPTICS EXPRESS, 2006, 14 (19): : 8604 - 8612
  • [2] A digital holographic microscope for complete characterization of microelectromechanical systems
    Coppola, G
    Ferraro, P
    Iodice, M
    De Nicola, S
    Finizio, A
    Grilli, S
    [J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 2004, 15 (03) : 529 - 539
  • [3] A nondestructive dynamic characterization of a microheater through digital holographic microscopy
    Coppola, Giuseppe
    Striano, Valerio
    Ferraro, Pietro
    De Nicola, Sergio
    Finizio, Andrea
    Pierattini, Giovanni
    Maccagnani, Piera
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, 16 (03) : 659 - 667
  • [4] Testing silicon MEMS structures subjected to thermal loading by digital holography
    Ferraro, P
    De Nicola, S
    Coppola, G
    Finizio, A
    Iodice, M
    Magro, C
    Pierattini, G
    [J]. RELIABILITY, TESTING AND CHARACTERIZATION OF MEMS/MOEMS III, 2004, 5343 : 235 - 243
  • [5] Global and local phase-unwrapping techniques: a comparison
    Fornaro, G
    Franceschetti, G
    Lanari, R
    Sansosti, E
    Tesauro, M
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1997, 14 (10) : 2702 - 2708
  • [6] Hornbeck L. J., 1987, US Patent, Patent No. 4662746
  • [7] KREIS T, 1917, HDB HOLOGRAPHIC INTE, P23
  • [8] Lateral scanning confocal microscopy for the determination of in-plane displacements of microelectromechanical systems devices
    Li, Zhi
    Herrmann, Konrad
    Pohlenz, Frank
    [J]. OPTICS LETTERS, 2007, 32 (12) : 1743 - 1745
  • [9] MEMS metrology techniques
    Novak, E
    [J]. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV, 2005, 5716 : 173 - 181
  • [10] Holographic Imaging technique for characterization of MEMS switch dynamics
    Ostasevicius, V
    Palevicius, A
    Daugela, A
    Ragulskis, M
    Palevicius, R
    [J]. SMART STRUCTURES AND MATERIALS 2004: SMART ELECTRONICS, MEMS, BIOMEMS AND NANOTECHNOLOGY, 2004, 5389 : 73 - 84
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