Detection of Moving Mirror Tilt in Fourier Transform Infrared Spectrometer

被引：0

作者：

Sun Xiaojie ^{[1
]}

Hua Jianwen ^{[1
]}

Dai Zuoxiao ^{[1
]}

Xia Xiang ^{[1
]}

Li Tao ^{[1
]}

Wang Zhirui ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Tech Phys, Shanghai 200083, Peoples R China

来源：

6TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT | 2012年 / 8417卷

关键词：

Fourier Transform Infrared Spectrometer; dynamic alignment system; laser interference signals; MISALIGNMENT;

D O I：

10.1117/12.975180

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Moving mirror tilt, which causes misalignment of two reflectors, is a key issue in Fourier Transform Infrared Spectrometer (FTIRS). Dynamic alignment system (DAS) is adopted to solve misalignment problem. High precision detection of dynamic misalignment angle is one of the most important steps in DAS, mainly upon which the adjustment performances of DAS depend. A new measuring algorithm is presented which is based on amplitude detecting [ 1][ 2] between laser interference signals generated by reference laser source in this paper. Mathematical analysis is described and experiment results are shown. These results show that the measuring precision of 0.6 micro-radians of dynamic tilting angle is achieved with this method. This is a guarantee for a FTIRS to acquire high interference efficiency.

引用

页数：5

共 9 条

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