Molecular field effect passivation: Quinhydrone/methanol treatment of n-Si(100)

被引:17
作者
Har-Lavan, Rotem [1 ]
Schreiber, Roy [1 ]
Yaffe, Omer [1 ]
Cahen, David [1 ]
机构
[1] Weizmann Inst Sci, Dept Mat & Interfaces, IL-76100 Rehovot, Israel
关键词
SILICON; SURFACES;
D O I
10.1063/1.4793497
中图分类号
O59 [应用物理学];
学科分类号
摘要
The quinhydrone/methanol treatment has been reported to yield outstanding passivation of the H-terminated Si(100) surface. Here, we report on the mechanism of this process by comparing the resulting surface to that of freshly etched H-terminated Si, of Si with chemically grown oxide, and of Si treated with hydroquinone/methanol solution of the same concentration. We find that the benzoquinone moieties of the quinhydrone react with the surface to yield a Si-hydroquinone surface termination, while the methanol molecules bind as well to form methoxy-terminated Si. The slightly negative-charged benzene ring of the hydroquinone acts to repel majority carrier electrons from the surface and inhabits the surface recombination. The higher the ratio of surface-bound hydroquinone to surface-bound methoxy species, the larger the minority carrier life-time measured by microwave photoconductivity. Thus, our results lead us to conclude that this treatment results in field effect passivation; remarkably, this effect is caused by a molecular monolayer alone. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4793497]
引用
收藏
页数:8
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