Cross-sectional sizes and emission wavelengths of regularly patterned GaN and core-shell InGaN/GaN quantum-well nanorod arrays

被引:31
|
作者
Liao, Che-Hao [1 ,2 ]
Chang, Wen-Ming [1 ,2 ]
Yao, Yu-Feng [1 ,2 ]
Chen, Hao-Tsung [1 ,2 ]
Su, Chia-Ying [1 ,2 ]
Chen, Chih-Yen [1 ,2 ]
Hsieh, Chieh [1 ,2 ]
Chen, Horng-Shyang [1 ,2 ]
Tu, Charng-Gan [1 ,2 ]
Kiang, Yean-Woei [1 ,2 ]
Yang, C. C. [1 ,2 ]
Hsu, Ta-Cheng [3 ]
机构
[1] Natl Taiwan Univ, Inst Photon & Optoelect, Taipei 10617, Taiwan
[2] Natl Taiwan Univ, Dept Elect Engn, Taipei 10617, Taiwan
[3] Epistar Corp, Hsinchu 30078, Taiwan
关键词
MOLECULAR-BEAM EPITAXY; LIGHT-EMITTING-DIODES; GROWTH; HETEROSTRUCTURES; NANOWIRES;
D O I
10.1063/1.4790710
中图分类号
O59 [应用物理学];
学科分类号
摘要
The cross-sectional sizes of the regularly patterned GaN nanorods (NRs) and InGaN/GaN quantum-well (QW) NRs of different heights and different hexagon orientations, which are grown on the patterned templates of different hole diameters, pitches, and crystal orientations, are compared. It is found that the cross-sectional size of the GaN NR, which is formed with the pulsed growth mode, is mainly controlled by the patterned hole diameter, and the thickness of the sidewall QW structure is mainly determined by the NR height. The cross-sectional size variation of GaN NR is interpreted by the quasi-three-dimensional nature of atom supply amount for precipitating a two-dimensional disk-shaped NR segment. The variation of the sidewall QW structure is explained by the condition of constituent atom supply in the gap volume between the neighboring NRs. Also, we compare the cathodoluminescence emission wavelengths among those samples of different growth conditions. Generally speaking, the QW NR with a smaller height, a larger cross-sectional size, or a larger pitch has a longer emission wavelength. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4790710]
引用
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页数:9
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