Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning

被引：85
作者：
Homola, Tomas [1 ,2 ]
Matousek, Jindrich [3 ]
Medvecka, Veronika [2 ]
Zahoranova, Anna [2 ]
Kormunda, Martin [3 ]
Kovacik, Dusan [2 ,4 ]
Cernak, Mirko [2 ,4 ]
机构：
[1] Singapore Inst Mfg Technol, Surface Technol Grp, Singapore 638075, Singapore
[2] Comenius Univ, Fac Math Phys & Informat, Dept Expt Phys, Bratislava 84248, Slovakia
[3] Univ JE Purkyne, Fac Sci, Dept Phys, Usti Nad Labem 40096, Czech Republic
[4] Masaryk Univ, R&D Ctr Low Cost Plasma & Nanotechnol Surface Mod, CS-61137 Brno, Czech Republic
来源：
APPLIED SURFACE SCIENCE | 2012年 / 258卷 / 18期
关键词：
Atmospheric diffuse plasma; DCSBD; Filament-free plasma; ITO surface; Cleaning; XPS; INDIUM-TIN-OXIDE; LIGHT-EMITTING DEVICES; THIN-FILMS; OXYGEN-PLASMA; WORK FUNCTION; BARRIER DISCHARGE; DIODES; PERFORMANCE; IMPROVEMENT; TRANSITION;
D O I：
10.1016/j.apsusc.2012.03.188
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Effects of atmospheric filament-free diffuse plasma in ambient air and oxygen by Diffuse Coplanar Surface Barrier Discharge (DCSBD) on surface of indium tin oxide (ITO) were studied. The DCSBD plasma treatment resulted in significant reduction of water contact angles (even for 1 s long treatment). The decrease can be explained by the chemical changes on surface. These were studied by XPS which shows considerable decrease in the carbon surface concentration. The detailed analysis of C1s peak indicates the increase of the highest binding energy component of the C1s peak that corresponds to polar bonds with oxygen, which may be also related to decrease of water contact angle. AFM measurement showed no significant effect of plasma on ITO surface morphology. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码：7135 / 7139
页数：5
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