Diamond RF FETs and other approaches to electronics

被引:15
作者
Kasu, Makoto [1 ]
Ueda, Kenji [1 ]
Kageshima, Hiroyuki [1 ]
Taniyasu, Yoshitaka [1 ]
机构
[1] NTT Corp, NTT Basic Res Labs, Atsugi, Kanagawa 2430198, Japan
来源
PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 5, NO 9 | 2008年 / 5卷 / 09期
关键词
D O I
10.1002/pssc.200779313
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond semiconductor possesses exceptional physical properties, such as high thermal conductivity, high breakdown field, and high mobility, and is therefore expected to offer the highest performance, among semiconductors as high-frequency, high-power transistors. At present the most critical issue in achieving diamond transistors is the lack of an n-type or p-type dopant with low activation energy. This paper reviews approaches towards electronic-device application of diamond done mainly by NTT Basic Research Laboratories. First it describes our diamond field-effect transistors with 0.1-mu m gate length, which exhibit high cut-off frequencies for the current and power gains, f(T) and f(MAX), of 45 GHz and of 120 GHz, and output power density of 2.1 W/mm at 1 GHz. Next it shows how doping efficiency in ion implantation can be improved by using high-pressure high-temperature annealing. Finally, it describes Our concept of diamond/nitride heterostructure and presents results that confirm its feasibility. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:3165 / 3168
页数:4
相关论文
共 16 条
[1]  
HIRAMA K, 2006, P 18 INT S POW SEM D
[2]   Enhancement/depletion MESFETs of diamond and their logic circuits [J].
Hokazono, A ;
Ishikura, T ;
Nakamura, K ;
Yamashita, S ;
Kawarada, H .
DIAMOND AND RELATED MATERIALS, 1997, 6 (2-4) :339-343
[3]   High carrier mobility in single-crystal plasma-deposited diamond [J].
Isberg, J ;
Hammersberg, J ;
Johansson, E ;
Wikström, T ;
Twitchen, DJ ;
Whitehead, AJ ;
Coe, SE ;
Scarsbrook, GA .
SCIENCE, 2002, 297 (5587) :1670-1672
[4]   Gate capacitance-voltage characteristics of submicron-long-gate diamond field-effect transistors with hydrogen surface termination [J].
Kasu, M. ;
Ueda, K. ;
Yamauchi, Y. ;
Makimoto, T. .
APPLIED PHYSICS LETTERS, 2007, 90 (04)
[5]   Diamond-based RF power transistors: Fundamentals and applications [J].
Kasu, M. ;
Ueda, K. ;
Yamauchi, Y. ;
Tallaire, A. ;
Makimoto, T. .
DIAMOND AND RELATED MATERIALS, 2007, 16 (4-7) :1010-1015
[6]   2W/mm output power density at 1 GHz for diamond FETs [J].
Kasu, M ;
Ueda, K ;
Ye, H ;
Yamauchi, Y ;
Sasaki, S ;
Makitnoto, T .
ELECTRONICS LETTERS, 2005, 41 (22) :1249-1250
[7]  
KASU M, DIAMOND REL IN PRESS
[8]   Hydrogen-terminated diamond surfaces and interfaces [J].
Kawarada, H .
SURFACE SCIENCE REPORTS, 1996, 26 (07) :205-259
[9]   ENHANCEMENT-MODE METAL-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS USING HOMOEPITAXIAL DIAMONDS [J].
KAWARADA, H ;
AOKI, M ;
ITO, M .
APPLIED PHYSICS LETTERS, 1994, 65 (12) :1563-1565
[10]  
Kohn E, 1998, SPR S MAT PROC, P331