Design and fabrication of pyrolyzed polymer micro and nano structures

被引:0
作者
Naka, K [1 ]
Konishi, S [1 ]
机构
[1] Ritsumeikan Univ, Grad Sch Sci & Engn, Katsuta, Shiga 5258577, Japan
来源
PROCEEDINGS OF THE 2005 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE: FROM MICRO & NANO SCALE SYSTEMS TO ROBOTICS & MECHATRONICS SYSTEMS | 2005年
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中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
This paper deals with pyrolyzed polymers as a kind of carbon materials obtained by a pyrolysis of polymers. A pyrolysis process is executed by a heat treatment in the absence of O-2. Various polymer materials utilized in MEMS are potential precursors of pyrolyzed polymers. Micromachining of polymers has allowed various polymer micro and nano structures. Polymer MEMS structures can be transformed into pyrolyzed polymer MEMS structures for various applications. This work focuses on design and fabrication of pyrolyzed polymer micro and nano structures through a combination of micromachining of polymers and following pyrolysis. Pyrolyzed polymer micro and nano bridge structures are fabricated for demonstrations. 100nm wide bridge could be successfully fabricated as the fine free structure. Furthermore, pyrolyzed parylene-C micro pillar allay was realized as vertical free standing pyrolyzed polymer structures.
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页码:103 / 108
页数:6
相关论文
共 14 条
[1]  
BROM B, 1979, SOLID STATE COMMUN, V35, P135
[2]   PYROLYZED, CONDUCTING KAPTON POLYIMIDE - AN ELECTRICALLY CONDUCTING MATERIAL [J].
HU, CZ ;
ANDRADE, JD .
JOURNAL OF APPLIED POLYMER SCIENCE, 1985, 30 (11) :4409-4415
[3]  
KAKUSSHIMA K, 2003, P 12 INT C SOL STAT, P328
[4]  
Kim HS, 2003, BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, P790
[5]   Electrochemical studies of carbon films from pyrolyzed photoresist [J].
Kim, J ;
Song, X ;
Kinoshita, K ;
Madou, M ;
White, B .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1998, 145 (07) :2314-2319
[6]   Parylene-pyrolyzed carbon for MEMS applications [J].
Konishi, S ;
Liger, M ;
Harder, TA ;
Tai, YC .
MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, :161-164
[7]   Surface studies of carbon films from pyrolyzed photoresist [J].
Kostecki, R ;
Schnyder, B ;
Alliata, D ;
Song, X ;
Kinoshita, K ;
Kötz, R .
THIN SOLID FILMS, 2001, 396 (1-2) :36-43
[8]   Uncooled all-parylene bolometer [J].
Liger, M ;
Konishi, S ;
Tai, YC .
MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, :593-596
[9]   Photoresist-derived carbon for microelectromechanical systems and electrochemical applications [J].
Ranganathan, S ;
McCreery, R ;
Majji, SM ;
Madou, M .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2000, 147 (01) :277-282
[10]   Pyrolysis of negative photoresists to fabricate carbon structures for microelectromechanical systems and electrochemical applications [J].
Singh, A ;
Jayaram, J ;
Madou, M ;
Akbar, S .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2002, 149 (03) :E78-E83